High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range.
نویسندگان
چکیده
High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
منابع مشابه
Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths.
High quality (Q approximately 6 x 10(5)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around wavegu...
متن کاملHigh Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics.
We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality optical resonators. In the telecoms C-band (1520-1580 nm), we obtain the highest optical Q factor of 440,000. Critical coupled devices show extinction ratio ab...
متن کاملToward ultimate miniaturization of high Q silicon traveling-wave microresonators.
High Q traveling-wave resonators (TWR)s are one of the key building block components for VLSI Photonics and photonic integrated circuits (PIC). However, dense VLSI integration requires small footprint resonators. While photonic crystal resonators have shown the record in simultaneous high Q (~10(5)-10(6)) and very small mode volumes; the structural simplicity of TWRs has motivated many ongoing ...
متن کاملSilicon quantum dots in microdisk resonators: Whispering-gallery modes, stress-induced Q-factor tuning and enhancement
We report on visible light emission from Si quantum dot (QD) based optically active microdisk resonators. Room temperature photoluminescence from single microdisks shows the characteristic modal structure of whispering-gallery modes (WGM). Highest quality factors of up to 7000 at visible wavelengths, where Si QDs absorb strongly, have been measured for the first time. Apart from conventional fl...
متن کاملPlanar photonic crystal microspectrometers in silicon-nitride for the visible range.
We demonstrate the feasibility of forming a compact integrated photonic spectrometer for operation in the visible wavelength range using the dispersive properties of a planar photonic crystal structure fabricated in silicon nitride. High wavelength resolution and compact device sizes in these spectrometers are enabled by combining superprism effect, negative diffraction effect, and negative ref...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید
ثبت ناماگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید
ورودعنوان ژورنال:
- Optics express
دوره 17 17 شماره
صفحات -
تاریخ انتشار 2009